@misc{indiciae21181e18f723,
  title = {Single crystal silicon capacitors with low microwave loss in the single photon regime},
  author = {S. Weber and K. W. Murch and D. H. Slichter and R. Vijay and I. Siddiqi},
  year = {2011},
  doi = {10.1063/1.3583449},
  url = {https://arxiv.org/abs/1102.2917},
  note = {Source identifier: 1102.2917}
}