TY  - RPRT
TI  - Single crystal silicon capacitors with low microwave loss in the single photon regime
AU  - S. Weber
AU  - K. W. Murch
AU  - D. H. Slichter
AU  - R. Vijay
AU  - I. Siddiqi
PY  - 2011
DO  - 10.1063/1.3583449
UR  - https://arxiv.org/abs/1102.2917
ID  - 1102.2917
ER  -