@misc{indiciaebfc2747ece84,
  title = {Characterization of ion/electron beam induced deposition of electrical contacts at the sub-μm scale},
  author = {D. Brunel and D. Troadec and D. Hourlier and D. Deresmes and M Zdrojek and T. Mélin},
  year = {2011},
  doi = {10.1016/j.mee.2011.03.011},
  url = {https://arxiv.org/abs/1103.1975},
  note = {Source identifier: 1103.1975}
}