TY  - RPRT
TI  - Characterization of ion/electron beam induced deposition of electrical contacts at the sub-μm scale
AU  - D. Brunel
AU  - D. Troadec
AU  - D. Hourlier
AU  - D. Deresmes
AU  - M Zdrojek
AU  - T. Mélin
PY  - 2011
DO  - 10.1016/j.mee.2011.03.011
UR  - https://arxiv.org/abs/1103.1975
ID  - 1103.1975
ER  -