@misc{indiciaeedbc9bea521a,
  title = {Fabrication of InP nano pillars by ECR Ar ion irradiation},
  author = {D. Paramanik and T. T. Suzuki and N. Ikeda and Y. Sugimoto and T. Nagai and M. Takeguchi and C. Van Haesendonck},
  year = {2011},
  url = {https://arxiv.org/abs/1104.1912},
  note = {Source identifier: 1104.1912}
}