@misc{indiciae106b1eb76b20,
  title = {Atomic layer deposition and superconducting properties of NbSi films},
  author = {Thomas Proslier and Jeffrey A. Klug and Jeffrey W. Elam and Helmut Claus and Nicholas G. Becker and Michael Pellin},
  year = {2011},
  url = {https://arxiv.org/abs/1104.3518},
  note = {Source identifier: 1104.3518}
}