@misc{indiciae8cf987ce675e, title = {High purity semi-insulating 4H-SiC epitaxial layers by Defect-Competition Epitaxy}, author = {MVS Chandrashekhar and Iftekhar Chowdhury and P. Kaminski and R. Kozlowski and P. B. Klein and Tangali Sudarshan}, year = {2011}, doi = {10.1143/apex.5.025502}, url = {https://arxiv.org/abs/1104.4509}, note = {Source identifier: 1104.4509} }