@misc{indiciae0376547062de,
  title = {Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam},
  author = {A. Bhushan and M. M. Inamdar and D. N. Pawaskar},
  year = {2011},
  url = {https://arxiv.org/abs/1104.4602},
  note = {Source identifier: 1104.4602}
}