TY  - RPRT
TI  - Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam
AU  - A. Bhushan
AU  - M. M. Inamdar
AU  - D. N. Pawaskar
PY  - 2011
UR  - https://arxiv.org/abs/1104.4602
ID  - 1104.4602
ER  -