TY - RPRT TI - Viscous damping of nanobeam resonators: humidity, thermal noise and the paddling effect AU - Chao Chen AU - Ming Ma AU - Jefferson Zhe Liu AU - Quanshui Zheng AU - Zhiping Xu PY - 2011 DO - 10.1063/1.3619854 UR - https://arxiv.org/abs/1105.0139 ID - 1105.0139 ER -