@misc{indiciaef25852f260d6,
  title = {Effects of electron beam induced carbon deposition on the mechanical properties of a micromechanical oscillator},
  author = {S. Zaitsev and O. Shtempluck and E. Buks},
  year = {2011},
  url = {https://arxiv.org/abs/1105.1049},
  note = {Source identifier: 1105.1049}
}