TY  - RPRT
TI  - Effects of electron beam induced carbon deposition on the mechanical properties of a micromechanical oscillator
AU  - S. Zaitsev
AU  - O. Shtempluck
AU  - E. Buks
PY  - 2011
UR  - https://arxiv.org/abs/1105.1049
ID  - 1105.1049
ER  -