@misc{indiciaec979c665d458,
  title = {Deposition of SiOx films by means of atmospheric pressure microplasma jets},
  author = {Jan Benedikt and Rüdiger Reuter and Dirk Ellerweg and Katja Rügner and Achim von Keudell},
  year = {2011},
  url = {https://arxiv.org/abs/1105.2691},
  note = {Source identifier: 1105.2691}
}