TY  - RPRT
TI  - Deposition of SiOx films by means of atmospheric pressure microplasma jets
AU  - Jan Benedikt
AU  - Rüdiger Reuter
AU  - Dirk Ellerweg
AU  - Katja Rügner
AU  - Achim von Keudell
PY  - 2011
UR  - https://arxiv.org/abs/1105.2691
ID  - 1105.2691
ER  -