@misc{indiciae682fdd818754,
  title = {The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure},
  author = {R. Reuter and K. Rügner and D. Ellerweg and T. de los Arcos and A. von Keudell and J. Benedikt},
  year = {2011},
  url = {https://arxiv.org/abs/1105.5899},
  note = {Source identifier: 1105.5899}
}