TY  - RPRT
TI  - The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure
AU  - R. Reuter
AU  - K. Rügner
AU  - D. Ellerweg
AU  - T. de los Arcos
AU  - A. von Keudell
AU  - J. Benedikt
PY  - 2011
UR  - https://arxiv.org/abs/1105.5899
ID  - 1105.5899
ER  -