@misc{indiciae0813582a5329, title = {Optical beam-induced scattering mode of mid-IR laser microscopy: a method for defect investigation in near-surface and near-interface regions of bulk semiconductors}, author = {O. V. Astafiev and V. P. Kalinushkin and V. A. Yuryev}, year = {2011}, url = {https://arxiv.org/abs/1106.0754}, note = {Source identifier: 1106.0754} }