TY  - RPRT
TI  - Optical beam-induced scattering mode of mid-IR laser microscopy: a method for defect investigation in near-surface and near-interface regions of bulk semiconductors
AU  - O. V. Astafiev
AU  - V. P. Kalinushkin
AU  - V. A. Yuryev
PY  - 2011
UR  - https://arxiv.org/abs/1106.0754
ID  - 1106.0754
ER  -