@misc{indiciae2a8d43c1f847,
  title = {Application of elastic mid-IR light scattering for inspection of internal gettering operations},
  author = {O. V. Astafiev and A. N. Buzynin and V. P. Kalinushkin and V. A. Yuryev},
  year = {2011},
  url = {https://arxiv.org/abs/1106.1128},
  note = {Source identifier: 1106.1128}
}