TY  - RPRT
TI  - Application of elastic mid-IR light scattering for inspection of internal gettering operations
AU  - O. V. Astafiev
AU  - A. N. Buzynin
AU  - V. P. Kalinushkin
AU  - V. A. Yuryev
PY  - 2011
UR  - https://arxiv.org/abs/1106.1128
ID  - 1106.1128
ER  -