@misc{indiciae1dd2edb7443f,
  title = {Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics},
  author = {V. P. Kalinushkin and V. A. Yuryev and O. V. Astafiev and A. N. Buzynin and N. I. Bletskan},
  year = {2011},
  doi = {10.1557/proc-378-615},
  url = {https://arxiv.org/abs/1106.1327},
  note = {Source identifier: 1106.1327}
}