TY  - RPRT
TI  - Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics
AU  - V. P. Kalinushkin
AU  - V. A. Yuryev
AU  - O. V. Astafiev
AU  - A. N. Buzynin
AU  - N. I. Bletskan
PY  - 2011
DO  - 10.1557/proc-378-615
UR  - https://arxiv.org/abs/1106.1327
ID  - 1106.1327
ER  -