@misc{indiciae9b295b694b12,
  title = {Periodic Variation of Stress in Sputter Deposited Si/WSi2 Multilayers},
  author = {Kimberley MacArthur and Bing Shi and Ray Conley and Albert T. Macrander},
  year = {2011},
  doi = {10.1063/1.3628242},
  url = {https://arxiv.org/abs/1106.2154},
  note = {Source identifier: 1106.2154}
}