TY  - RPRT
TI  - Periodic Variation of Stress in Sputter Deposited Si/WSi2 Multilayers
AU  - Kimberley MacArthur
AU  - Bing Shi
AU  - Ray Conley
AU  - Albert T. Macrander
PY  - 2011
DO  - 10.1063/1.3628242
UR  - https://arxiv.org/abs/1106.2154
ID  - 1106.2154
ER  -