@misc{indiciae90e6c61a3675,
  title = {Modeling of ion-implanted atoms diffusion during the epitaxial growth of the layer},
  author = {O. I. Velichko and V. A. Burko},
  year = {2011},
  url = {https://arxiv.org/abs/1106.2313},
  note = {Source identifier: 1106.2313}
}