@misc{indiciaead5e266bd1ab,
  title = {Silicon dry oxidation kinetics at low temperature in the nanometric range: Modeling and experiment},
  author = {Christophe Krzeminski and Guilhem Larrieu and Julien Penaud and Evelyne Lampin and Emmanuel Dubois},
  year = {2012},
  doi = {10.1063/1.2711764},
  url = {https://arxiv.org/abs/1106.3160},
  note = {Source identifier: 1106.3160}
}