TY  - RPRT
TI  - Silicon dry oxidation kinetics at low temperature in the nanometric range: Modeling and experiment
AU  - Christophe Krzeminski
AU  - Guilhem Larrieu
AU  - Julien Penaud
AU  - Evelyne Lampin
AU  - Emmanuel Dubois
PY  - 2012
DO  - 10.1063/1.2711764
UR  - https://arxiv.org/abs/1106.3160
ID  - 1106.3160
ER  -