@misc{indiciae2af1dbab0a6f, title = {Formation and annealing of dislocation loops induced by nitrogen implantation of ZnO}, author = {Guillaume Perillat-Merceroz and Patrice Gergaud and Pascal Marotel and Stéphane Brochen and Pierre-Henri Jouneau and Guy Feuillet}, year = {2011}, doi = {10.1063/1.3537917}, url = {https://arxiv.org/abs/1106.4383}, note = {Source identifier: 1106.4383} }