TY  - RPRT
TI  - Simulation of ion-implanted boron redistribution under different conditions of the transient enhanced diffusion suppression
AU  - O. I. Velichko
AU  - A. P. Kavaliova
PY  - 2011
UR  - https://arxiv.org/abs/1106.4845
ID  - 1106.4845
ER  -