@misc{indiciaed139d616d7d7,
  title = {Morphology change of the silicon surface induced by Ar\$\textasciicircum{}+\$ ion beam sputtering},
  author = {V. O. Kharchenko and D. O. Kharchenko},
  year = {2011},
  doi = {10.5488/cmp.14.23602},
  url = {https://arxiv.org/abs/1106.6256},
  note = {Source identifier: 1106.6256}
}