TY  - RPRT
TI  - Morphology change of the silicon surface induced by Ar$^+$ ion beam sputtering
AU  - V. O. Kharchenko
AU  - D. O. Kharchenko
PY  - 2011
DO  - 10.5488/cmp.14.23602
UR  - https://arxiv.org/abs/1106.6256
ID  - 1106.6256
ER  -