@misc{indiciae255412121608, title = {Mechanically Compliant Grating Reflectors for Optomechanics}, author = {Utku Kemiktarak and Michael Metcalfe and Mathieu Durand and John Lawall}, year = {2011}, doi = {10.1063/1.3684248}, url = {https://arxiv.org/abs/1107.3170}, note = {Source identifier: 1107.3170} }