@misc{indiciae6503ca2822bd,
  title = {Thermoplastic deformation of silicon surfaces induced by ultrashort pulsed lasers in submelting conditions},
  author = {G. D. Tsibidis and E. Stratakis and K. E. Aifantis},
  year = {2012},
  doi = {10.1063/1.3688020},
  url = {https://arxiv.org/abs/1107.3256},
  note = {Source identifier: 1107.3256}
}