TY  - RPRT
TI  - Thermoplastic deformation of silicon surfaces induced by ultrashort pulsed lasers in submelting conditions
AU  - G. D. Tsibidis
AU  - E. Stratakis
AU  - K. E. Aifantis
PY  - 2012
DO  - 10.1063/1.3688020
UR  - https://arxiv.org/abs/1107.3256
ID  - 1107.3256
ER  -