@misc{indiciae792d66e4c614, title = {Effects related to deposition temperature of ZnCoO films grown by Atomic Layer Deposition - uniformity of Co distribution, structural, optical, electrical and magnetic properties}, author = {Malgorzata I. Lukasiewicz and Bartlomiej Witkowski and Marek Godlewski and Elzbieta Guziewicz and Maciej Sawicki and Wojciech Paszkowicz and Rafal Jakiela and Tomasz A. Krajewski and Grzegorz Luka}, year = {2011}, doi = {10.1002/pssb.200983689}, url = {https://arxiv.org/abs/1107.5210}, note = {Source identifier: 1107.5210} }