TY - RPRT TI - Effects related to deposition temperature of ZnCoO films grown by Atomic Layer Deposition - uniformity of Co distribution, structural, optical, electrical and magnetic properties AU - Malgorzata I. Lukasiewicz AU - Bartlomiej Witkowski AU - Marek Godlewski AU - Elzbieta Guziewicz AU - Maciej Sawicki AU - Wojciech Paszkowicz AU - Rafal Jakiela AU - Tomasz A. Krajewski AU - Grzegorz Luka PY - 2011 DO - 10.1002/pssb.200983689 UR - https://arxiv.org/abs/1107.5210 ID - 1107.5210 ER -