@misc{indiciae4d28c6659aa8, title = {Properties and characterization of ALD grown dielectric oxides for MIS structures}, author = {S. Gieraltowska and D. Sztenkiel and E. Guziewicz and M. Godlewski and G. Luka and B. S. Witkowski and L. Wachnicki and E. Lusakowska and T. Dietl and M. Sawicki}, year = {2011}, url = {https://arxiv.org/abs/1107.5401}, note = {Source identifier: 1107.5401} }