@misc{indiciae933f1ff0a7a5,
  title = {Diamond Processing by Focused Ion Beam - Surface Damage and Recovery},
  author = {Igal Bayn and Asaf Bolker and Catherine Cytermann and Boris Meyler and Vladimir Richter and Joseph Salzman and Rafi Kalish},
  year = {2011},
  doi = {10.1063/1.3658631},
  url = {https://arxiv.org/abs/1108.0850},
  note = {Source identifier: 1108.0850}
}