@misc{indiciae7dc89db6324c,
  title = {Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe},
  author = {Vladimir V. Talanov and André Scherz and Robert L. Moreland and Andrew R. Schwartz},
  year = {2011},
  doi = {10.1063/1.2203238},
  url = {https://arxiv.org/abs/1108.2218},
  note = {Source identifier: 1108.2218}
}