TY  - RPRT
TI  - Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe
AU  - Vladimir V. Talanov
AU  - André Scherz
AU  - Robert L. Moreland
AU  - Andrew R. Schwartz
PY  - 2011
DO  - 10.1063/1.2203238
UR  - https://arxiv.org/abs/1108.2218
ID  - 1108.2218
ER  -