@misc{indiciaec96d8cda9ede,
  title = {Noncontact electrical metrology of Cu/low-k interconnect for semiconductor production wafers},
  author = {V. V. Talanov and A. Scherz and A. R. Schwartz},
  year = {2011},
  doi = {10.1063/1.2216898},
  url = {https://arxiv.org/abs/1108.2225},
  note = {Source identifier: 1108.2225}
}