TY  - RPRT
TI  - Noncontact electrical metrology of Cu/low-k interconnect for semiconductor production wafers
AU  - V. V. Talanov
AU  - A. Scherz
AU  - A. R. Schwartz
PY  - 2011
DO  - 10.1063/1.2216898
UR  - https://arxiv.org/abs/1108.2225
ID  - 1108.2225
ER  -