@misc{indiciae359da818b9d8,
  title = {Near-field scanning microwave microscope for interline capacitance characterization of nanoelectronics interconnect},
  author = {Vladimir V. Talanov and Andrew R. Schwartz},
  year = {2011},
  doi = {10.1109/tmtt.2009.2017352},
  url = {https://arxiv.org/abs/1108.2226},
  note = {Source identifier: 1108.2226}
}