TY  - RPRT
TI  - Near-field scanning microwave microscope for interline capacitance characterization of nanoelectronics interconnect
AU  - Vladimir V. Talanov
AU  - Andrew R. Schwartz
PY  - 2011
DO  - 10.1109/tmtt.2009.2017352
UR  - https://arxiv.org/abs/1108.2226
ID  - 1108.2226
ER  -