@misc{indiciae05f6f532c52e,
  title = {Fabrication of submicron La\$\_\{2-x\}\$Sr\$\_\{x\}\$CuO\$\_\{4\}\$ intrinsic Josephson junction stacks},
  author = {Yuimaru Kubo and Yamaguchi Takahide and Takayoshi Tanaka and Shinya Ueda and Satoshi Ishii and Shunsuke Tsuda and A. T. M. Nazmul Islam and Isao Tanaka and Yoshihiko Takano},
  year = {2011},
  doi = {10.1063/1.3544037},
  url = {https://arxiv.org/abs/1108.3469},
  note = {Source identifier: 1108.3469}
}