@misc{indiciaeca2160c01192, title = {Potential of the FLASH FEL technology for the construction of a kW-scale light source for the next generation lithography}, author = {E. A. Schneidmiller and V. F. Vogel and H. Weise and M. V. Yurkov}, year = {2011}, url = {https://arxiv.org/abs/1108.5986}, note = {Source identifier: 1108.5986} }