TY  - RPRT
TI  - Potential of the FLASH FEL technology for the construction of a kW-scale light source for the next generation lithography
AU  - E. A. Schneidmiller
AU  - V. F. Vogel
AU  - H. Weise
AU  - M. V. Yurkov
PY  - 2011
UR  - https://arxiv.org/abs/1108.5986
ID  - 1108.5986
ER  -