@misc{indiciae593565b39088,
  title = {Electrical Properties of Atomic Layer Deposited Aluminum Oxide on Gallium Nitride},
  author = {Michele Esposto and Sriram Krishnamoorthy and Digbijoy N. Nath and Sanyam Bajaj and Ting-Hsiang Hung and Siddharth Rajan},
  year = {2011},
  doi = {10.1063/1.3645616},
  url = {https://arxiv.org/abs/1109.2566},
  note = {Source identifier: 1109.2566}
}