@misc{indiciae73848df92600,
  title = {Modeling and simulation of ion energy distribution functions in technological plasmas},
  author = {Thomas Mussenbrock},
  year = {2011},
  doi = {10.1002/ctpp.201210053},
  url = {https://arxiv.org/abs/1109.4435},
  note = {Source identifier: 1109.4435}
}