@misc{indiciae31ec2bcceb68,
  title = {A single layer hydrogen silsesquioxane (HSQ) based lift-off process for germanium and platinum},
  author = {Vikram Passi and Aurélie Lecestre and Christophe Krzeminski and Guilhem Larrieu and Emmanuel Dubois and Jean-Pierre Raskin},
  year = {2011},
  doi = {10.1016/j.mee.2009.11.022},
  url = {https://arxiv.org/abs/1109.5187},
  note = {Source identifier: 1109.5187}
}